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梁荣庆, 辛煜, 宁兆元, 张树宇. 微等离子体及其应用[J]. 物理, 2007, 36(10): 771-776.
引用本文: 梁荣庆, 辛煜, 宁兆元, 张树宇. 微等离子体及其应用[J]. 物理, 2007, 36(10): 771-776.
Microplasma and its applications[J]. PHYSICS, 2007, 36(10): 771-776.
Citation: Microplasma and its applications[J]. PHYSICS, 2007, 36(10): 771-776.

微等离子体及其应用

Microplasma and its applications

  • 摘要: 微等离子体已成为近年来国际上低温等离子体研究的热点课题之一。微等离子体是被限制在一个有限的空间范围内(尺度为毫米量级甚至更低)的等离子体,它通常能够运行在大气压条件下,它的低功耗、高密度、高稳定等特性以及其小巧、经济、便携等优势,为其在紫外光源的获得、微化学分析系统、生物医学、材料表面改性和加工、环境污染物的处理等领域提供了广泛的应用空间。文章对微等离子体及其应用进行了综述,介绍了各种微等离子体源的产生方法,以及它们在不同领域的研究和应用情况。

     

    Abstract: Microplasma is now becoming an important field of research on non-thermal plasma. Spatial confinement to dimensions of 1mm or less and operation at atmospheric pressure gives microplasma many advantages like low power consumption, high density, high stability and convenient portability. All these advantages open the door to a wide range of new applications of microplasma in areas such as ultraviolet sources, analytical chemistry, biomedicine, surface treatment and environmental remediation. This paper reviews a variety of methods generating microplasma and its applications in different fields.

     

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