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刘琳, 刘宏微, 吕俊鹏. 聚焦激光束在微纳材料中的应用[J]. 物理, 2019, 48(12): 809-816. DOI: 10.7693/wl20191205
引用本文: 刘琳, 刘宏微, 吕俊鹏. 聚焦激光束在微纳材料中的应用[J]. 物理, 2019, 48(12): 809-816. DOI: 10.7693/wl20191205
LIU Lin, LIU Hong-Wei, LU Jun-Peng. Applications of focused laser beams in micro-nano materials[J]. PHYSICS, 2019, 48(12): 809-816. DOI: 10.7693/wl20191205
Citation: LIU Lin, LIU Hong-Wei, LU Jun-Peng. Applications of focused laser beams in micro-nano materials[J]. PHYSICS, 2019, 48(12): 809-816. DOI: 10.7693/wl20191205

聚焦激光束在微纳材料中的应用

Applications of focused laser beams in micro-nano materials

  • 摘要: 低维微纳材料因其特有的小尺寸效应以及由此而来丰富的物理性质,预示着其在后摩尔时代的电子、光电器件中将发挥重要作用。由于微纳材料的小尺寸特性,通过运用传统技术,很难实现对微纳材料的精准操控,制约了微纳材料在微型化、集成化、多元化器件中的应用。文章回顾了聚集激光技术的发展历程,重点介绍如何通过聚焦激光束实现对微纳材料的精准操控、加工与改性,并对聚焦激光技术的研究前景进行展望。

     

    Abstract: Low-dimensional micro-nano materials will play an important role in electronic and optoelectronic devices in the post-Moore law period because of their unique small size effects and their resulting interesting physical properties. Due to the small size characteristics of micronano materials, it is difficult to achieve precise control using traditional techniques. This restricts the application of micro-nano materials in miniaturized, integrated and diversified devices. This article presents a review on the development of focused laser beam technology, especially on how it can be used to achieve the precise manipulation, manufacture and modification of micro-nano materials. Finally, we look at the future prospects of focused laser beam technology.

     

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