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李超, 杨光. 扫描透射电子显微镜及电子能量损失谱的原理及应用[J]. 物理, 2014, 43(09): 597-605. DOI: 10.7693/wl20140904
引用本文: 李超, 杨光. 扫描透射电子显微镜及电子能量损失谱的原理及应用[J]. 物理, 2014, 43(09): 597-605. DOI: 10.7693/wl20140904
LI Chao, YANG Guang. The principle and applications of STEM and EELS[J]. PHYSICS, 2014, 43(09): 597-605. DOI: 10.7693/wl20140904
Citation: LI Chao, YANG Guang. The principle and applications of STEM and EELS[J]. PHYSICS, 2014, 43(09): 597-605. DOI: 10.7693/wl20140904

扫描透射电子显微镜及电子能量损失谱的原理及应用

The principle and applications of STEM and EELS

  • 摘要: 扫描透射电子显微镜是透射电子显微镜的一种,近几年随着球差校正器的问世,扫描透射电子显微镜的分辨率达到亚埃级,结合能量分辨率为亚电子伏特的电子能量损失谱,可以对材料进行高空间分辨率及高能量分辨率的微结构和成分分析。文章简述了扫描透射电子显微镜的发展历程和工作原理,重点讲述了高角环形暗场像的成像机理以及基于高角环形暗场像对材料结构和成分进行分析的原理和应用;电子能量损失谱的成谱过程、谱的特征及其在材料化学和电子结构分析方面的优势和主要应用。

     

    Abstract: The scanning transmission electron microscope (STEM) is one kind of transmission electron microscope. With the invention of the spherical aberration corrector, the resolution of STEM can reach sub-Ångstrom levels. High spatial resolution imaging and high energy resolution spectroscopy can be achieved simultaneously through the combination of STEM and electron energy loss spectroscopy (EELS). The fundamentals and application of STEM will be briefly introduced, with emphasis on the basics of high angle annular dark field imaging and its application in microstructural and chemical analyses. The characteristic features of EELS and its application in material science will also be discussed.

     

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